Ultra High Vacuum (UHV) Ceramic Components | Hermetic & Low Outgassing Ceramic Solutions
High-performance UHV ceramic components with ultra-low leak rates and low outgassing. Ideal for semiconductor, vacuum, and high-reliability applications.
UHV ceramic components
ultra high vacuum ceramics
vacuum ceramic insulators
hermetic ceramic components
low outgassing ceramics
ceramic feedthrough vacuum
Product Overview
Ultra High Vacuum (UHV) ceramic components are precision-engineered parts designed for applications requiring extremely low leak rates and minimal outgassing. These components are typically manufactured from high-purity ceramics such as alumina (Al₂O₃), aluminum nitride (AlN), or zirconia (ZrO₂), and are often combined with metallization and brazing technologies to achieve hermetic ceramic-to-metal assemblies.
UHV ceramic components are critical in maintaining stable vacuum environments, especially in semiconductor processing, scientific research, and advanced industrial systems.
Key Features
1. Ultra-Low Leak Rate
Designed to meet UHV standards (e.g., ≤ 1×10⁻⁹ atm·cc/s).
2. Low Outgassing
Minimizes contamination in vacuum environments.
3. Hermetic Sealing Capability
Reliable ceramic-to-metal sealing performance.
4. High Electrical Insulation
Suitable for high-voltage vacuum systems.
5. Thermal Stability
Performs reliably under thermal cycling.
Typical Products
Ceramic vacuum feedthroughs
UHV ceramic insulators
Metallized ceramic rings
Vacuum chamber ceramic parts
Custom hermetic ceramic assemblies
Applications
Semiconductor processing equipment
Vacuum chambers and systems
Particle accelerators and research labs
Aerospace and defense vacuum systems
High-voltage vacuum insulation systems
Technical Advantages
Maintains vacuum integrity over long-term operation
Compatible with high-purity and clean environments
Excellent resistance to thermal and mechanical stress
Customizable for complex vacuum system designs
Manufacturing Capability
High-purity ceramic material processing
Precision machining for tight tolerances
Metallization (Mo-Mn, W, thin film)
Vacuum brazing and sealing
Helium leak testing and quality assurance
Customization Options
Material selection (Al₂O₃, AlN, ZrO₂)
Geometry and dimensional tolerances
Metallization patterns
Assembly and sealing solutions
OEM production based on drawings
Localized Title (US)
UHV Ceramic Components for Vacuum Systems | Hermetic Low-Outgassing Ceramics in USA
Localized Content Snippet
We supply high-quality ultra high vacuum ceramic components across the United States for semiconductor and vacuum applications. Our products ensure ultra-low leakage and high reliability.
OEM customization and bulk supply available.
🔹 CTA
Request a UHV Ceramic Quote
Submit Your Vacuum System Design
Contact Our Engineering Team
tem | Unit | ||||
A-95 | A-75 | MS-1 | |||
Bulk Density | ambient temperatures | g/cm³ | ≥3.64 | ≥3.2 | ≥2.7 |
Helium Leak Rate(Tightness) | pa.m3/s | ≤1×10 ^-11 | —— | —— | |
Flexural Strength | ambient temperatures | Mpa | 336.1 | 280 | 160 |
Average Linear Expansion Coefficient | （20~500）℃ | 1/℃ | 7.27×10^-6 | 6.21×10^-6 | 8.48×10^-6 |
（20~800）℃ | 7.73×10^-6 | —— | —— | ||
Dielectric Constant | Mhz20℃ | 9.4 | 8.7 | 7.5 | |
Volume Resistivity | 100℃ | Ω.cm | 5.2×10^15 | 4.5×10^13 | 3.7×10^13 |
300℃ | 5.6×10^14 | —— | —— | ||
500℃ | 4.8×10^13 | —— | —— | ||
Dielectric Loss | 20℃ | 2.4×10^-4 | ≤10×10^-4 | ≤8×10^-4 | |
DC Breakdown Strength | KV/mm | 42.0 | 34 | 28 | |
Thermal Stability | ambient temperatures~800℃ | pass | —— | —— | |
Chemical Stability | 10%HCI | Mg | 4.657 | —— | —— |
1:9NaOH | 0.075 | —— | —— | ||
Area | Gauge length | Maximum load | Maximum stress | |
Unit | mm2 | mm | kN | MPa |
1 | 122.0000 | 100.0000 | 13.1016 | 107.390 |
2 | 122.0000 | 100.0000 | 16.9062 | 138.576 |
3 | 122.0000 | 100.0000 | 13.1273 | 107.601 |
4 | 122.0000 | 100.0000 | 14.4523 | 118.462 |
5 | 122.0000 | 100.0000 | 12.2820 | 100.672 |
6 | 122.0000 | 100.0000 | 13.2656 | 108.735 |
7 | 122.0000 | 100.0000 | 13.8773 | 113.749 |
8 | 122.0000 | 100.0000 | 17.4781 | 143.263 |
Average value | 14.3113 | 117.306 |
